JPH0365906U - - Google Patents
Info
- Publication number
- JPH0365906U JPH0365906U JP12801889U JP12801889U JPH0365906U JP H0365906 U JPH0365906 U JP H0365906U JP 12801889 U JP12801889 U JP 12801889U JP 12801889 U JP12801889 U JP 12801889U JP H0365906 U JPH0365906 U JP H0365906U
- Authority
- JP
- Japan
- Prior art keywords
- laser light
- detection element
- warpage
- instrument
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 229910000831 Steel Inorganic materials 0.000 claims 1
- 239000010959 steel Substances 0.000 claims 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12801889U JPH0365906U (en]) | 1989-11-01 | 1989-11-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12801889U JPH0365906U (en]) | 1989-11-01 | 1989-11-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0365906U true JPH0365906U (en]) | 1991-06-26 |
Family
ID=31675750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12801889U Pending JPH0365906U (en]) | 1989-11-01 | 1989-11-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0365906U (en]) |
-
1989
- 1989-11-01 JP JP12801889U patent/JPH0365906U/ja active Pending